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ECP Series Automatic Wafer ( Horizontal ) Plating Machine

(1) Application fields: Pillar,Bump,RDL,TSV and other processes

(2) Wafer size: 150mm&200mm&300mm (customizable)

(3) Process index: high uniformity: WiW≤3%, WtW≤3%, RtR≤3%

Product Overview

(1) Application fields: Pillar,Bump,RDL,TSV and other processes

(2) Wafer size: 150mm&200mm&300mm (customizable)

(3) Process index: high uniformity: WiW≤3%, WtW≤3%, RtR≤3%

(4) Equipment features:

◎ Equipped with 3 Load ports

◎ Industrial control machine touch screen operation control, convenient and fast

◎ Use genuine industrial iot configuration software for control and monitoring

◎ Support SECS/GEM communication protocol and data transmission

◎ Horizontal plating chamber, no cross contamination

◎ Equipped with two-arm wafer handling manipulator imported from Japan, efficient and stable

◎ Equipped with 2 prepreg cavities

◎ Equipped with up to 8 plating cavities (customized)

◎ Equipped with 2 cleaning chambers

◎ Equipped with 2 drying chambers

◎ Equipped with automatic addition system

◎ Coating type: Cu,Ni,Au,Sn,Ag


ECP Series Automatic Wafer (Horizontal) Plating Equipment

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Product Name: ECP Series Automatic Wafer ( Horizontal ) Plating Machine