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Automatic Wafer Cleaning Machine After Scrubbing

High Precision Cleaning


Fully automated processes


Excellent material compatibility


Energy efficient design


Product Overview

JuYongNeng automatic wafer cleaning machine is an advanced solution designed for precision cleaning in semiconductor manufacturing. This system efficiently removes contaminants from wafer surfaces, ensuring high-quality preparation for subsequent processing stages like etching, deposition, and photolithography. As a top-tier cleaning machine of semiconductor wafers, it's ideal for applications in photoresistance removal and post-grinding wafer cleaning.


Product Features of JYN Automatic Wafer Cleaning Machine


1. Diverse Wafer Sizes and Customizable Features

Our automatic wafer cleaning machine accommodates wafer sizes of 150mm, 200mm, and 300mm, with customizable configurations to suit specific production needs. This machine supports cleaning processes for wafers with processes of 19nm and above, making it versatile for various advanced semiconductor applications.


2. Flexible and Advanced Equipment Features

The automatic wafer cleaning machine is designed with a range of innovative features:

  • Load Ports: Equipped with 2 to 3 load ports for high-efficiency handling.

  • User-Friendly Control System: Industrial-grade touch screen operation powered by genuine IoT configuration software ensures easy control and real-time monitoring.

  • Communication Protocol: Supports SECS/GEM communication protocol for seamless data transfer and system integration.

  • Horizontal Chamber Design: This prevents cross-contamination, enhancing overall cleanliness and process efficiency.

  • Dual-Arm Manipulator: Imported from Japan, this component ensures stable and precise wafer handling, supporting up to 8 customizable cleaning chambers.


3. Specific Object Compatibility

The single wafer cleaning system effectively cleans various materials, including:

  • Single crystal materials (e.g., GaN, SiC, AlN, Sapphire, Diamond)

  • Optical glass

  • Biochips



Wafer Process Systems and Cleaning Techniques


1. Original Scrubber Cleaning System

Our PCB cleaning machine incorporates a high-efficiency scrubber cleaning system, delivering superior particle removal without causing damage to the wafer surface or subsurface layers. This makes it suitable for critical applications requiring pristine wafer surfaces.


2. Precision Drying System

Equipped with a decentering spin dryer, this machine ensures thorough drying of small wafers, reducing drying times and enhancing productivity. The precision drying mechanism maintains surface integrity and prepares wafers for the next processing stage in the fabrication line.


3. Diverse Cleaning Options for Wafer Process Systems

Wafer cleaning systems vary based on the application and contaminants targeted:

  • Ultrasonic Cleaning Equipment: Utilizes high-frequency sound waves to agitate cleaning solutions and remove surface contaminants.

  • Solvent Cleaning Equipment: Combines solvents and mechanical action to dislodge debris.

  • Acid Cleaning Equipment: Uses acidic solutions to dissolve surface contaminants.

  • Plasma Cleaning Equipment: Employs plasma discharge to eliminate contaminants via high-energy ionization.



Automatic Wafer Cleaning Device After Grinding


Why Choose JYN Wafer Cleaning Machine?


Efficiency and Safety in Semiconductor Wafer Cleaning

Our automatic wafer cleaning machine is engineered to deliver efficient, safe cleaning in semiconductor manufacturing. By minimizing the risk of contamination and maintaining surface integrity, it improves device performance and longevity in applications like microelectronics fabrication.


Customizable Cleaning Solutions

The automatic wafer cleaning machine offers customization options, from specific cleaning chambers to adaptable process features, ensuring it meets unique manufacturing requirements in semiconductor and related industries.


Durability and Quality Control

With its durable design and high-quality components, including vacuum chucks, megasonic cleaning capabilities, and robust spin drying, this cleaning machine of semiconductor wafers provides optimal cleaning outcomes, reducing operational costs and enhancing production reliability.



JYN automatic wafer cleaning machine stands out as an essential asset in semiconductor manufacturing. Its advanced design, high-quality scrubber and drying systems, and compatibility with varied materials make it a reliable cleaning machine of semiconductor wafers. Contact us to incorporate this machine into your Wafer Process Systems, ensure efficient, contaminant-free wafers that meet the highest standards in semiconductor production.


Our products are very popular, if you are interested in our products, please contact us as soon as possible. Email: jyn@jyn-online.com

Product Name: Automatic Wafer Cleaning Machine After Scrubbing